Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  FIRESTONE LAWRENCE
 2. Date of Event Requiring Statement (Month/Day/Year)
10/27/2005		 3. Issuer Name and Ticker or Trading Symbol
AMTECH SYSTEMS INC [ASYS]
(Last)
(First)
(Middle)
C/O APPLIED FILMS CORP, 9586 I-25 FRONTAGE ROAD		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
__X__ Director _____ 10% Owner
_____ Officer (give title below) _____ Other (specify below)
5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

LONGMONT, CO 80504		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Employee Director Stock Option (1) 10/27/2006(2) 10/27/2015(3) Amtech Systems, Inc. $.01 par value common stock 6,000 $ 5.41 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
FIRESTONE LAWRENCE
C/O APPLIED FILMS CORP
9586 I-25 FRONTAGE ROAD
LONGMONT, CO 80504		   X      

Signatures

Robert T. Hass, as Attorney-In-Fact for Lawrence Firestone 11/07/2005
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Option to purchase Amtech Systems, Inc., $.01 par value common stock.
(2) One-third of the stock options granted vest on each of the first three anniversaries of the grant date.
(3) Any unexercised stock options expire 90 days after membership on the Board of Directors terminate, except that the expiration is one year from the date of termination if such termination is the result of death, or the Board of Directors exercises its discretion to the set another period for expiration at the time of termination.

Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, See Instruction 6 for procedure.

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