Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  Lawson Douglas A.
 2. Date of Event Requiring Statement (Month/Day/Year)
11/13/2013		 3. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ACLS]
(Last)
(First)
(Middle)
C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
EVP, Corporate Mktg & Strategy
 5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

BEVERLY, MA 01915		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 10,098
D
 
Common Stock 7,500
I
By spouse

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Stock option (right to buy) (1) 01/15/2014(2) 01/15/2020 Common Stock 12,500 $ 1.59 D  
Stock option (right to buy) (1) 07/15/2014(3) 07/15/2020 Common Stock 65,000 $ 1.6 D  
Stock option (right to buy) (1) 07/15/2015(4) 07/15/2021 Common Stock 40,000 $ 1.6 D  
Stock option (right to buy) (5) 07/16/2016(6) 07/16/2019 Common Stock 37,500 $ 0.93 D  
Stock option (right to buy) (5) 07/15/2017(7) 07/15/2020 Common Stock 75,000 $ 1.99 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
Lawson Douglas A.
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY, MA 01915		       EVP, Corporate Mktg & Strategy  

Signatures

Lynnette C. Fallon, as attorney in fact for Douglas A. Lawson 11/14/2013
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Granted pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.
(2) To become exercisable on 1/15/2014.
(3) Exercisable as to 46,250 shares and to become exercisable as to an additional 18,750 on 7/15/2014.
(4) Excercisable as to 20,000 shares and to become exercisable as to an additional 10,000 shares on each of 7/15/2014 and 7/15/2015.
(5) Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.
(6) To become exercisable as to 12,500 shares on each of 7/16/2014, 7/16/2015 and 7/16/2016.
(7) To become exercisable as to 18,750 shares on each of 7/15/2014, 7/15/2015, 7/15/2016 and 7/15/2017.

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